A Differential Monolithically Integrated Inductive Linear Displacement Measurement Microsystem
نویسندگان
چکیده
منابع مشابه
A Differential Monolithically Integrated Inductive Linear Displacement Measurement Microsystem
An inductive linear displacement measurement microsystem realized as a monolithic Application-Specific Integrated Circuit (ASIC) is presented. The system comprises integrated microtransformers as sensing elements, and analog front-end electronics for signal processing and demodulation, both jointly fabricated in a conventional commercially available four-metal 350-nm CMOS process. The key novel...
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ژورنال
عنوان ژورنال: Sensors
سال: 2016
ISSN: 1424-8220
DOI: 10.3390/s16030384